SM-Series End Block0 pages
SM-Series End Block
FEATURES:
••
••
••
••
••
••
••
Customized drive shaft length
Compact and flexible form factor
Easy access water seal cartridge
Patented power-delivery technology
Simple design - fewer parts and highly reliable
Magnet bar externally adjusts to any angle
Patented target water fill/drain feature
BENEFITS:
Patented SM-Series External
Mount End Block
•• Wider glass coverage than traditional drop-in
••
••
••
••
••
••
••
••
end blocks
Fits most chamber designs
All utilities are external and remain attached
during target changeover
High-packing density; dual cathodes in
400mm space
Drive motors mount up, down, inward, or
outward
High-power with no inductive heating impact no brush dust
Simple, in-house maintenance
Allows co-sputtering, tighter plasma coupling,
and limits shield coating
Reduced pump time for more stable process
NEW SYSTEM INSTALLATIONS:
UPGRADE PLANARS TO ROTARIES:
•• Coater modification and integration
support available
•• Switch between planars and outside
mounts in the same position
CANTILEVER CAPABILITY:
Metric: XY/2 + 16X2 < 138
Imperial: XY/2 + 0.9X2 < 12,000
X = Backing tube length (meters or inches)
Y = Weight of target (kg or lbs only)
•• Our compact design allows chamber design
flexibility and the ability to install more
cathodes in your system
•• Integrate with TRM-Bar,™ QRM-Bar™ or
mQRM-BarTM magnetics and e-Cathode™
systems - ready to drop in
Model
Power
V/A
Target (mm)
SM
Up to 200kW DC or
80 kHz MFAC
1500V/450A
Up to 4000
"