e-Cathode Lid Clones0 pages
e-Cathode™ Lid Clones
T M
End users seeking to add additional
cathodes to their system look to SCI
for plug-and-play solutions. Our eCathodeTM clones match all your current external mechanical and electrical interfaces, but use SCI end
blocks, magnet bars, and cathode
control systems.
Von Ardenne®1/Applied Materials®2 Digital Clone
DIGITAL AND ANALOG FEATURES:
{{ Local and remote control
{{ Optional MFC, gas bar, and anode integration
{{ Full safety interlocks
{{ Customized discrete I/O connector
{{ High voltage, quick disconnect included
{{ User defined target-to-substrate distance
DIGITAL ONLY FEATURES:
{{ Integrated PLC and touch panel
{{ Real-time monitoring
BOC 3 Analog Clone
{{ Advanced parameter monitoring
{{ Communicates via ethernet, profibus, DH+ and
more
ANALOG ONLY FEATURES:
{{ Analog control interface
{{ Basic parameter monitoring
BENEFITS:
{{ Integrates simply with older coaters; no need
for controls upgrade
1 Von Ardenne® is a registered trademark of Von Ardenne Anlagentechnik Gmbh.
2 Applied Materials® is a registered trademark of Applied Materials, Inc.
Bekaert®4 Digital Clone
3 BOC® and Airco® are registered trademarks of The BOC Group, Inc.
4 Bekaert® is a registered trademark of N.V. BEKAERT S.A. PUBLIC LIMITED COMPANY BELGIUM
Sputtering Components, Inc 375 Alexander Drive, Owatonna, Minnesota 55060 USA
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