e-Cathode? OEM Lid0 pages
e-Cathode™ OEM Lids
T M
SCI provides OEM equipment builders
complete turn-key solutions, ready to
interface with their systems. SCI can
customize these solutions to provide
as much controls integration as desired
onboard the e-Cathode™.
OEM Digital e-CathodeTM
DIGITAL AND ANALOG FEATURES:
{{ Local and remote control
{{ Optional MFC, gas bar, and anode integration
{{ Full safety interlocks
{{ Customized discrete I/O connector
{{ High voltage, quick disconnect included
{{ User defined target-to-substrate distance
DIGITAL ONLY FEATURES:
{{ Integrated PLC and touch panel
{{ Real-time monitoring
{{ Advanced parameter monitoring
{{ Communicates via ethernet, profibus, DH+ and
more
ANALOG ONLY FEATURES:
{{ Analog control interface
{{ Basic parameter monitoring
BENEFITS:
{{ Speeds system design and integration
{{ Reduce cabling requirements
1 Von Ardenne® is a registered trademark of Von Ardenne Anlagentechnik Gmbh.
2 Applied Materials® is a registered trademark of Applied Materials, Inc.
3 BOC® and Airco® are registered trademarks of The BOC Group, Inc.
4 Bekaert® is a registered trademark of N.V. BEKAERT S.A. PUBLIC LIMITED COMPANY BELGIUM
OEM Analog e-CathodeTM
Sputtering Components, Inc 375 Alexander Drive, Owatonna, Minnesota 55060 USA