Mini XP0 pages
Mini XP
TM
Advanced compact Fizeau interferometer with a proprietary method
of phase-shifting acquisition that enables reliable metrology in
production environments.
SYSTEM OVERVIEW
Description
Advanced version of the Mini
interferometer with additional software
functionality including phase map,
Zernikes, Seidels, ISO 10110-5,
comparative radius of curvature and
optional encoded radius of curvature.
Models
Base- includes mainframe, controller,
touchscreen, & acquisition trigger sensor.
Workstation- includes base components
plus vertical rail with part stage.
Encoded Workstation- includes workstation
components with encoded rail for radius of
curvature.
Measurement
Technique
Mechanical phase-shifting interferometry
with vibration tolerant acquisition.
Test Beam Diameter
60 mm
Zoom
1X to 4X, digital
Alignment FOV
±1.1 degrees
Laser Source
Laser diode, Class II
Wavelength
637 nm, nominal
Pupil Focus Range
±1500 mm
Coherence Length
>0.75 m
Transmission Spheres
RMS Simple
Repeatability (2σ)2
Acquisition Time
<3 sec (typical)
PHYSICAL CHARACTERISTICS
Mainframe
Dimensions (LWH)
5.6 kg (12.4 lb)
Workstation
Dimensions (LWH)
293 x 249 x 695 mm
(11.5 x 9.8 x 27.4 in.)
Workstation Weight
12.9 kg (28.5 lb)
Power
ZYGO Bayonet mount to M76x2.00-5g
thread; mounts into accessory receptacle.
226 x 140 x 183 mm
(8.9 x 5.5 x 7.2 in.)
Mainframe Weight
Attaches to part stage; useful when
measuring plano parts.
TS Adapter Ring
≤ λ/200 (3.2 nm)
60 mm clear aperture; Standard, surfaces
from 0.1 to 40% reflectivity; DynaflectTM,
surfaces from 4 to 90% reflectivity.
Tip/Tilt Mount
λ/12 PV
60 mm input aperture; λ/20 PVr quality;
f/0.7, f/1.0, f/1.5, f/2.0, f/3.4, f/5.7
Transmission Flats
PERFORMANCE
Optical Performance1
ACCESSORIES
100 to 240 VAC, 50/60 Hz
The rail provides
350 mm of travel
and features a
counterbalanced
part stage with
quick release
knobs for easy
z-axis positioning.
OPERATIONAL ENVIRONMENT3
Temperature
15° to 25°C (59° to 77°F)
Vibration Isolation
A vibration isolation table is not required
for typical test site environments
TRANSMISSION SPHERE COVERAGE
1. The instrument uncertainty budget supports surface form metrology of
λ/12 PV optical surfaces. The final metrology result is dependent on the
reference optic quality, environmental stability, and cavity geometry.
2. RMS Simple Repeatability is defined by 2X the standard deviation of the
RMS for 20 sequential measurements (no averaging) of a spherical cavity
between a 60 mm f/1.0 TS (reference radius = 47 mm) and a concave
test sphere of radius 25 mm.
3. These conditions define the environment under which the system can
operate; they do not represent the environmental stability required to
meet specified performance.
Specifications subject to change without notice
Zygo Corporation
Laurel Brook Road
Middlefield, CT 06455
Phone: 860-347-8506
Email: inquire@zygo.com
Website: www.zygo.com
SS-0097B 05/13
© 2013 Zygo Corporation