HD9800+ 3D Optical Microscope0 pages

HD9800+ 3D Optical Microscope
Automated, Gage-Capable Metrology for HD Industrial Production
The HD9800+ 3D Optical Microscope combines the
most advanced optical metrology technology with
advanced automation optimized for HD process control
to enable the world’s best PTR and flatness metrology
performance. The system incorporates decades of
industrial HD metrology experience using white
light interferometry (WLI), self-calibration, LED highintensity illumination, operator-friendly software, and
a host of other features to provide the high-resolution,
non-destructive, gage-capable measurements that data
storage manufacturers need to improve process quality
and increase yield.

Innovation with Integrity

Benchmark for accuracy and robustness
World leading GR&R performance for PTR and

flatness metrology
Vibration-tolerant design with integrated air isolation

for production floor use
High-resolution camera option for ultimate in lateral

resolution and accuracy

Optical Metrology