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IL C 38000 pages
semiconductor
Development and production
of laser and sorting systems
IL C 3800 Advanced Sorting System
The Innolas IL C 3800 is a multi-functional system
for sorting, transfering and inspection of 300mm
wafers. The detailed configuration and extensive
accessories results in the IL C 3800 being an exceptionally powerful and multi-faceted solution.
The integrated mini environment has an ionization
unit with laminar flow and pressure control.
The IL C 800 can be equipped with up to seven
3
load/unload stations that can be loaded manually
or automatically in accordance with the SEMI E84
specification. The system uses an Innolas edge grip
handling system together with a patented Innolas edge grip aligner for automatic orientation of
300mm wafers.
The IL C 3800 offers the possibility to integrate a SEMI E63 measurement system. A comprehensive GEM serial communication software
is among the numerous options available for IL C 3800 system.
