IL 10000 pages

Development and Production
of laser marking and sorting equipment

IL 1000 LED and Semiconductor
Wafer Marking System
The Innolas IL 1000 series laser system is
designed to mark various wafer materials with
diameters ranging from 2“ to 200mm.
Different laser types and setups are available to
achieve optimum process results for various
materials such as Si, GaAs, Ge, SiC, GaP, InP,
Sapphire, Quartz and others.
A deep or debris free marking process is
available. Our application engineers are happy to
help you with the best process setup.
The wafer marking system is controlled by a 19“
industrial PC. The powerful WindowsTM based
software package includes a user friendly
operator and engineer interface along with
sophisticated diagnostic features for
maintenance and service personal.
Software options include wafer sorting and
SECS/GEM host interface. Customized software
solutions are available upon request.

Standard Features

Optional Features

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Supports wafer sizes 2” to 200mm
Single cassette station
High system throughput

Excellent accuracy and repeatability
- Various lasers available to support
all types of materials
(e.g. Si, GaAs, SiC, Sapphire)

Auto Power Controller
Hand held barcode reader
Motorized telescope

SECS/GEM interface
- Wafer ID verification