Ortus 7000 pages
Optic
Ortus 700
The classical approach for optical applications
Proven design and technical solutions,
modern components
Ideal for flexible small-scale production
Good performance of the equipment is
provided by high pumping and coating
speed
Ion-beam assistance to obtain dense and
stable coatings
Вакуум, который создает
Main s pec ifi c ations
Chamber diameter
Pumping system
Ultimate pressure in clean dry chamber, Pa
700 mm
Dry pump for low vacuum, turbo molecular or cryogenic pump for
high vacuum.
2 х 10 -4
Optical control and quartz control systems.
Optical control system samples and quartz crystal control plates are
placed into a control unit, which is designed to automatically change
them.
Monitoring system
Substrate holder
Heating
Technological devices
Coating uniformity for the entire spherical surface of the
dome-shaped substrate holder sector, not more than, %
Coating uniformity for the satellite of the planetary
substrate holder, not more than %
Optical control wavelength range, nm:
one-beam control:
380-1100, 380-1700, 380-2600, 1200-5000,380-5000, 200-1100,
200-1700, 200-2600, 200-5000
spectral control:
380-740, 380-1100, 1000-1700, 200-1100, 380-1700
Dome or planetary type
IR lamps, Resistive heater
Electron beam evaporator, Thermal evaporator, Ion beam source
(option), Magnetron (option)
+/- 2
+/- 1,5
U til ities
Water
CDA
Power
Gases
Installation area, mm
Weight, kg
Distilled
6…8 kg/cm2
380/220 V ±10%, 50 Hz
Ar 99,99%, 0.2 l/min
O2 99,7%, 0.2 l/min
3470х2440х2430 mm
2000
Схема размещения
системы в рабочем зале
ООО «Изовак»
тел.: +375 17 2931842
факс. : +375 17 2931845
info@izovac.com
www.izovac.com