Aspira 1500 pages
Optic
Aspira 150
Ion-beam technology for stable and precision coatings application
Compact system for R&D and small batch
production
The unique design of a substrates holder
assure stable quality precision coatings
Ion-beam technology ensure highly stable
precision coatings
Load-lock ensure a fast start loading
process
Precision optical control for accurate
determination of coatings thickness
Combination of ion-beam and magnetron
sputtering method
Вакуум, который создает
Main s pec ifi c ations
Substrate holder size
Pumping system
Monitoring system
Ø150 мм
Dry pump for low vacuum, turbo molecular or cryogenic pump
for high vacuum.
Optical control wavelength range, nm:
One-beam control:
380-1100 nm, 380-1700 nm, 380-2600 nm, 1200-5000 nm,
380-4000 nm
Spectral control:
380-740 нм, 380-1100 нм, 1000-1700 нм, 380-1700 нм
Heating
Technological devices
Coating uniformity, not more than, %
Quartz control (option)
IR lamps, Resistive heater
Ring-type ion-beam sputtering source with six-station target unit
and neutralizer.
DC ring magnetron - 3 pcs. (permanently installed on the mechanism of targets change).
+/- 5% - for Ø 150 мм
+/- 2% - for Ø 120 мм
+/- 0,7% - for Ø 90 мм
U til ities
Water
CDA
Power
Gases
Installation area, mm
Distilled
6…8 kg/cm2
380/220 V ±10%, 50 Hz
Ar 99,99%, 0.2 l/min
O2 99,7%, 0.2 l/min
2000,00 х 2600,00 х 2900,00 мм (L x W х H)
Схема размещения
системы в рабочем зале
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fax.: +375 17 2931845
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