ECA series0 pages
cMcMatsusada Prcision ECAs senes 2ch output. Rack mount Bi-polar type ±1kV to ±10kV/6W 30W This is a high voltage power supply developed especially for electrostatic chuck application. The wafer can be held or released by DC ON/OFF. Smooth release of chuck is also possible by reversing the polarity. This is an useful power supply suitable both for uni-polar systems(2ch) or bi-polar systems. i Specially designed for Electrostatic Chuck application i 2 output channels(1kV to 5kV) i Bi-polar output iBuilt-in RF filter is available(option) Fast response with electronically polarity change lUses no relay, so high reliability and long life IMENSIONS inch(mm) Front 6x1Qmm0 REMOTE CH1 kV CH2 kV 2 2 2 LOCAL mA mA i r P1 P2 r T H MODEL Height(H) P1 P2 Weight(lb) ECA-1B6x2 3.5"(89) 3"(76.2) 2"(5Q) 22 ECA-1B3Qx2 3.5"(89) 3"(76.2) 2"(5Q) ECA-3B2x2 3.5"(89) 3"(76.2) 2"(5Q) ECA-3B1Qx2 3.5"(89) 3"(76.2) 2"(5Q) ECA-5B1x2 3.5"(89) 3"(76.2) 2"(5Q) ECA-5B6x2 3.5"(89) 3"(76.2) 2"(5Q) ECA-1QBQ.5 5.3"(133) 2.25"(57.15) 4"(1QQ) 33 ECA-1QB3 5.3"(133) 2.25"(57.15) 4"(1QQ) POWER HV □ □ Adj Adj © ® 18.3(465) with Protection cover 19(482) -n Rear D: 21.7(550) Remote control connector (D-sub 25pin female)
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