EJC series0 pages
Matsusada Prcision Single channel, Handy Bi-polar type ±1kV to ±5kV/6W 30W This is a high voltage power supply developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity. FEATURES Specially designed for Electrostatic Chuck application 镕 Fast response(10ms) with electronically polarity change Bi-polar output Օ Integrated RF filter(optional) Long life and high reliability with no relay DIMENSIONS inch(mm) 5.5Hx16.9Dx8.35W (140x430x212)
"