Gasket-Sertâ„¢ Filter0 pages
Data Sheet E32b
Gas Filtration Metal
Product shown larger than actual size
Gasket-Sert ™ Filter
Description
Specifications
The Gasket-Sert filter is designed to
protect major components of gas panels
employed in semiconductor gas distribution systems.
Materials
Operating Conditions
• Medium: 316L or Hastelloy C-22
• Gasket: Nickel 200
• Recommended Flow Range:
0-10 SCFM/0-280 slpm
• Maximum Operating Temperature:
Non-Corrosive Gases: 840°F / 450°C
Corrosive Gases: 70°F / 21°C
• Maximum Differential Pressure:
400 psid @ 840°F / 27 bar @ 450°C
750 psid @ 100°F / 52 bar @ 38°C
Removal Rating
• True in-line design and easy installation
• Fits in place of standard 1⁄4" VCR
Gasket
• Available in 316L or Hastelloy C-22
• Gasket material Nickel 200
• Broad compatibility with process gases
• Low differential pressure
• All metal construction
• Dried with high purity nitrogen
• Cleanroom packaged
• No particle contribution above
background
• No housing required
• Retrofit of existing panels without
reconfiguring of systems
• Zero displacement
•