EZ In-Line Filter Assembly0 pages
A104
nnnnPALL) Microelectronics
nnnnIn-Line Filter Assembly1
nnnnDescription
nnnnThe EZ In-line compact capsule assembly
nnnnis ideally suited for filtering a broad range
nnnnof liquids from photoresists, Including
nnnnpigmented color resists, to various slurries
nnnnsuch as CMP and ceramic. Other applica-
nnnntions include color Inks, photoemulsions,
nnnnmagnetic coatings, and conductive and
nnnnglass pastes. It Is the largest capsule In
nnnnthe EZ series of assemblies offering quick,
nnnnone-step filter replacements. Manifold
nnnnconnections are designed for easy
nnnnremoval of nozzles for cleaning.
nnnn• Allows for quick and safe filter change-
nnnnouts, and easy maintenance.
nnnn• In-line flow design minimizes dead space
nnnn• Capsule design prevents Incorrect
nnnnorientation and Installation
nnnn• Connection nozzles designed for simple
nnnnchange-out and easy maintenance
nnnn• Ease of use sharply reduces down-time
nnnn• Minimizes operator exposure to solvents
nnnn• Profile Star depth filter media is
nnnnespecially suited for the removal of gels,
nnnnaggregates and oversize particles
nnnn• Available In nominal 130 mm (5 In.) and
nnnn260 mm (10 In.) length cartridges
nnnnsuitable for most applications
nnnn• Broad choice of connection sizes
nnnnSpecifications
nnnnMaterials
nnnnFilter Capsule
nnnn• Filter medium: Polypropylene
nnnn• Core, cage, end caps, support,
nnnndrainage and housing: Polypropylene
nnnn• End seal/side seal: Heat sealed
nnnn• O-ring options: EPDM, Perfluoro
nnnnelastomer
nnnnHead Manifold
nnnn• Frame: FEP coated SUS 304
nnnn• Connections (removal nozzles): PTFE
nnnnRemoval Ratings
nnnn• 1.5 urn, 3.5 urn, 5 urn
nnnnConnections
nnnn• Inlet/Outlet:
nnnn10 mm Swagelok2 compatible
nnnn8 mm Swagelok compatible
nnnn%" Swagelok compatible
nnnnSwagelok compatible
nnnn• Vent/Drain:
nnnn8 mm Swagelok compatible
nnnn6 mm Swagelok compatible
nnnnVf Swagelok compatible
nnnnProduct only available In Asia
nnnnSwagelok is a trademark of Swagelok Co
nnnnOperating Conditions
nnnn• Maximum Operating Temperature:
nnnn• Maximum Operating Pressure:
nnnn0.19 MPa @ 30°C
nnnn30°C
nnnnFiltration. Separation. Solution.!*
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