DFA?-EZ Filter Assembly (CMP)0 pages
CMP Filtration Filters A101
nnnnPALL) Microelectronics
nnnnDFA™-EZ Filter Assembly1
nnnnDescription
nnnnThe DFA™-EZ compact filter capsule
nnnnassembly Is designed for small volume
nnnnprocessing. The configuration allows for
nnnnquick, safe and simple filter change-outs
nnnnand easy maintenance. It is Ideally suited
nnnnfor point-of-use filtration of photoresists,
nnnnvarious slurries and other compatible liquids.
nnnn• In-line flow path with minimal dead space
nnnn• One-step quick disconnect filter
nnnnreplacement
nnnn• The Profile® depth filter media is Ideally
nnnnsuited for the removal of gels,
nnnnaggregates and oversize particles
nnnn• Capsule design prevents Incorrect
nnnnorientation and installation
nnnn• Nozzle connections can be readily
nnnnremoved for cleaning
nnnn• Compact size
nnnn• Ease of use minimizes down-time
nnnn• Minimizes operator exposure to solvents
nnnn• Small footprint permits Installation In
nnnnnarrow confines
nnnnSpecifications
nnnnMaterials
nnnnFilter Capsule
nnnn• Medium: Polypropylene
nnnn• Core, cage, end caps, support,
nnnndrainage and housing: Polypropylene
nnnn• End seal/Side seal: Heat sealed
nnnn• O-rlng options: EPDM, Perfluoro-
nnnnelastomer
nnnnHead Manifold
nnnn• Frame: SUS 304 (FEP coated)
nnnn• Connection Nozzles: Polyethylene
nnnnRemoval Ratings
nnnn• 1.5 urn, 3 urn, 5 urn
nnnnOperating Conditions
nnnn• Maximum Operating Temperature: 38°C
nnnn• Maximum Operating Pressure: 0.19 MPa
nnnn@ 38°C
nnnnConnections
nnnn• Inlet/Outlet:
nnnn6 mm Swagelok2 compatible, Vf
nnnnSwagelok compatible
nnnn• Vent/Drain
nnnn6 mm Swagelok compatible,
nnnn%" Swagelok compatible
nnnn1 This product is only available in Asia.
nnnn2 Swagelok is a trademark of Swagelok Co
nnnnFiltration. Separation. Solution.sM
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