PSX3070 pages

2008

IC Assembly System
catalog
PLASMA CLEANER

High Productivity Plasma Cleaner
with 1.5 Times The Productivity

Model ID
Model No.
Cleaning Methed
Gas for Electrical Discharge*1
Substrate Dimensions
Substrate Thickness
Dimensions / Mass *3

Model No.NM-EFP1A

Model ID

Power Source *4
Pneumatic Source

Super
cost
saver

PSX307
NM-EFP1A
Parallel plate RF back-sputtering method
Ar [option:O2]
L 50 mm X W 20 mm to L 250 mm X W 75 mm*2 incl. S type option
L 50 mm X W 20 mm to L 330 mm X W 120 mm incl. M type option
0.5 mm to 2.0 mm
W 930 mm X D 1100 mm X H 1 450 mm / 555 kg
W 1 764 mm X D 1 100 mm X H 1 450 mm / 850 kg incl. S type option
W 1 764 mm X D 1 100 mm X H 1 450 mm / 770 kg incl. M type option
1-phase AC 200 V, 2.00 kVA [Full Load 5.00 kVA]
0.49 MPa or more, 6.5 L/min [A.N.R.]

*Please refer to the specifications on details.
*1: If the optional oxygen gas is selected as a discharge gas, nitrogen gas is also required to dilute exhaust.
*2: For W 70.1mm to W 75mm, the electrode in the chamber is required separately.
*3: Tolerance of equipment dimensions is ±5mm, Touch panel and condition lamp is not included. Mass varies depending on configuration.
*4: Compatible with 1-phase 208/220/230/240 V