Datasheet mass flow Meter SFM41000 pages

SeiMSIRION TH 5CNSOR COMPANY SFM4100 Sɩries Low-cost Digital Mass Flow Meter for Gases ■ Accuracy5%rav. ■ Digital output (PC) ■ Multigas option available ■ Calibrated and temprature compensated ■ Excellent long-term stability Product Summary The SFM4100 gas flow meter sries is des»gned as a versatile OEM gas flow meter for demanding volume applications. The SFM4100 is desrgned to measure Air and non-aggressive gases with excellent accuracy over a large dynamjc range. Mass tlows ranges up to 20 slm are available. The SFM4100 s驩ries oprtes wrth supply voltage 5-9 VDC and through rts digital I2C interface it can be easily embedded into a microprocessor environment. The sturdy design of the SFM4100 sensor allows for op颩ration pressures up to 7 bar absolute pressure. The flow signal is intemally lineralized and temprature compensated. The outstanding performance of thse sensors is based on Sensirions patented CMOSens1' sensor technology. which combines the sensor 騩lment, signal processing and digital calibrabon on a single microchip. The mass flow is measured by a thermal method on the MEMS sensor l驩ment Compared to other thermal mass flow sensors (MEMS. hotwire or capillary type) the SFM4100 features an extended dynamic range, higher long-term stability, and improved repeatability. The well-proven CMOS technology is perfectly suited for high-quality mass production and is Oie idal choice for demanding and cost-sensitve OEM applications Applications Sensor chip The SFM4100 s鮩ries features a fourth-generabon silicon sensor chip called SF04. In addition to a thermal mass flow sensor lment the chip contains an amplifier, A/D converter, EEPROM memory, digital signal processing circuitry, and interface. The highly sensrtive chip is particularly sensrtive at lowest flowst giving the SFM4100 sensor its large dynamic range. M驩dical le .g. respiratory care, anesthesia) Analybcal Instruments Leak testing Process automation Connection diagram YDD VLS-2.9-5.W SFM4100 OEM options A variety of custom options such as other analog output, diffrent gases. flow ranges, multigas calibration can be implemented for high-voJume OEM applications >1000pcM. Ask us for more information. SDA SCK GNP SFM4100 sries with btdirectional digital communication [PC bus) v*v*v/ sensinon 驜m Vcrston t 1 -Junc2010