Datasheet Liquid Flow Meter SLG640 pages

Preliminary Datasheet SLG64-0075 Ultra High Pressure Flow Sensor for LC Applications ■ Flow Sensing up to 5 pl/min, Extended to 20 Ljl/min ■ Operating Pressure up to 1000 bar (15000 psi) ■ 30 ms Response Time N5IRION 1 Introduction SLG64-0075 The SLG64-0075 Ultra High Pressure Flow Sensor enables prcise, non invasive, bi-direcbonal measurements of dynamic liquid flow rates in the microliter range. This device has been des*gned for ultra high pressure applications in Liquid Chromatography Systems (UHPLC). Excellent bio-compatibility and chemical rsistance is ensured by the exclusive use of fused silica. stainless steel and PEEK1fci for ail wetted parts. The flow path of the SLG64-0075 Liquid Flow Sensor 15 formed by pressure r驩sistant fused silica capillary. This Swiss made, non invasive sensor is based on Sensirion's patented CMOSens* Technology {US Patent 6,813,944 82), 2 Sensing Performance The SLG64-0075 is offering two diffrent flow sensing modes. The Prcision Mode allows for pr驩cise flow sensing starting at zro flow while the Extended Mode is made for a rough estimation of the current mass flow in higher flow ranges Please refer to related application notes for instructions how to switch between modes. Table 1; Performance of SLG64-0075 [ail data for mdium HA 20°C, 1 bar*, unies* otherwise noted) Parameter Pr驩cisionMode Extended Mode Mjx ",um f Vvh Rr\\v. 5000 ?0000 nl/min Lowest Cahtxaled flow (LCr) 250 2000* nl/min Digital Resolubon al LOF (16 bit) 0.5 ibd ni/mm Accuracy6 above LCF 10 20 % of m.v.c Acturacy belowLCF 0.5 n'a % of fui scale RepeatahHy (3a) 06 1 2 %mv.e Signal Noise, 16 bit Agitai output - at LCF at Maximum How Haie 45 4i> . sa m 30 nl/min 30 90 nl/min Temprature Coefficient 05 05 (%m.v.«)'K Mounting Onentalion Sensilivity3 <01 <01 % of fui scale riow Dtection Response Time 40 tbd ms Response Time On Power-Up 120 ms Digrtal Sampling Raie. 16 bit M ms Digital Sampling Rate. 9 bil 1 iris Operating Temperalure +10..-50 | +10...+50 ■c Ambient slorage lempefalure -10+60 ■c * No output values kiwor than this linul c nvv. = "ot the measured va*ue" d Normal posilion Hon/ontal flow channel, eleetncal connecter on top www sensinon com Auqust2011 _ VI0 1/5