Datasheet Mass Flow Meter EM1 for Gases0 pages

CMOSens® EM1 Mass Flow Meter for Gases CMOSens® technology Unbeatable price/performance ratio High output data speed (up to 200 Hz) Wide dynamic range (1:100 with 3% m.v. accuracy) Various maximum flow ranges: up to 200 ln/min (FS) Digitally calibrated & temperature compensated RS232 interface RoHS compliant v 3.0/ March 2009 CMOSens® EM1 Product Summary The CMOSens® EM1 Mass Flow Meter (MFM) enables fast and economical measurement of gas flows over a very wide dynamic range. Its leading price/performance ratio is based on Sensirion's unsurpassed CMOSens® sensor technology which combines a sensor element with the amplification and A/D converter circuit on one single CMOS chip. This results in good performance, fast response time and large dynamic range at very attractive cost. All measurement data is fully calibrated and temperature compensated by means of an internal micro controller. Mounted in rugged, chemically inert housing the CMOSens® EM1 Mass Flow Meter is suitable for a wide range of applications. Such include mass flow metering for process control, medical applications and fuel cells. The sensor housing provides two inlets for measuring the gas flow and withstands overpressures of 8 bar (116 psi). The CMOSens® EM1 Mass Flow Meter requires a supply voltage of 7-18 Vdc and provides an RS232 electrical interface. EM1 is RoHS compliant. CMOSens® SENSORCHIP CMOSens* S. | O .s 5°" S .E ni P SI ^ Cl a E i/J to no longer supported Si =h to ף ll ta c : CECA ■ Ilil □ -*V*. N X je < : M I io lO ■A < Resolution settings dtermine the intgration period between 5ms and 540 m s Integrated R驩solution temprature settitigs sensor Figure 1 : Block Diagram CMOSens® EM1 Mass Flow Meter. www.sensirion.com Data Sheet EM1 - v 3.0 / March 2009 1 / 14