Datasheet Mass Flow Controller SFC3000 for Gases0 pages
CMOSens® SFC3000 Digital OEM Mass Flow Controller for Gases SENSIRION th sensor company High performance digital Mass Flow Controller CMOSens® technology with unbeatable price/performance ratio For high-volume OEM applications Fully digital (interface, control, calibration & temperature compensation) Small size, manifold mountable Multigas option (switchable by software) NIST traceable calibration - Information November 2008 - v1.6 CMOSens® SFC3000 Product Summary The CMOSens® SFC3000 family offers fully digital Mass Flow Controllers, Mass Flow Meters, and Pressure Controllers for analytical instruments featuring an RS485 interface. Its leading performance is based on Sensirion's unsurpassed CMOSens® sensor technology which combines a high precision sensor element with the amplification and A/D converter circuit on one single CMOS chip. The analog sensor signal is converted directly on the CMOSens® chip into digital calibrated and temperature compensated signal which is used in a microprocessor running a sophisticated controlling algorithm. This results in very high flexibility, ultra-high stability and repeatability over a large dynamic range. Different gas types and control ranges can be switched by software, even during operation. The SFC3000 provides a standard digital RS485 hardware interface for setting and reading flows. It requires a standard supply voltage of +15 VDC. The MFC can be operated at input pressures of up to 10 bar (145 psi). www.sensirion.com Sensirion - the sensor company
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