Liquid Flow Sensor LG160 pages

Datasheet LG16 Media Isolated Microfluidic Flow Sensor ■ Liquid flow rates up to 5000 |jl/min ■ Resolutions down to sub nl/min ■ Totally non invasive, pressures up to 200 bar ■ Digital I2C interface or analog out 0-5 V 1 Introduction LG16 The LG16 Liquid Flow Sensor series enables fast, non invasive measurements of very low liquid flow rates below 5 ml/min. This product line is especially suited for OEM volume applications requiring small sized components with high performance at low cost. Excellent chemical resistance and bio-compatibility are ensured: The flow path of the LG16 Liquid Flow Sensors is formed by a simple, straight glass capillary. This Swiss made, non invasive sensors are based on Sensirion's patented CMOSens® Technology (US Patent 6,813,944 B2). The fourth generation MEMS sensors combine a thermal high precision sensor element with amplification circuits and digital intelligence for linearization and temperature compensation on one single microchip - the products core element. 2 Sensing Performance Table 1 : Model specific performance of LG16 (all data for medium H2O, 20°C, 1 barabs unless otherwise noted) Parameter LG16-0025 LG16-0150 LG16-0480 LG16-1000 LG16-2000 Maximum Flow Rate 1.50 7.00 50 1000 5000 ml/min Lowest Calibrated Flow (LCF) 0.07 0.4 1.0 30 200 ml/min Digital Resolution at LCF (16 bit) 0.084 0.24 0.60 12 150 nl/min Accuracya above LCF 10 5.0 5.0 5.0 5.0 % of m.v.b Accuracy below LCF 0.5 0.25 0.1 0.15 0.2 % of full scale Signal Noise, 16 bit digital output - at LCF - at Maximum Flow Rate 4.5 4.5 4.5 4.5 4.5 LSB 0.002 0.010 0.025 0.25 3.0 ml/min 0.004 0.040 0.300 5.0 20 ml/min Signal Noise, analog output, RMS < 2 mV Temperature Coefficient 0.15 0.09 0.13 0.1 0.1 (% m.v.b) / K Mounting Orientation Sensitivityc - <0.4 <0.4 1.0 1.5 % of full scale Flow Detection Response Time t63 40 40 ms Response Time On Power-Up 120 120 ms Digital Sampling Rate, 16 bit 74 74 ms Digital Sampling Rate, 9 bit 1 1 ms Operating Temperature +10...+50 +10...+50 °C Ambient storage temperature -10...+60 -10...+60 °C 3 Output Signais The OEM flow sensor LG16 shows bi-directional, linear transfer characteristics. The product comes fully calibrated for water - for volume applications flow calibration for methanol or other media is available on request. a Better available on request. b Measured value c Normal position: Horizontal flow channel www.sensirion.com January 2011 _ V1.2 1/5