7600 pages

Model 760 VactronTM Series
Capacitance Manometer - Absolute Pressure Transducer
Gases Compatible with Inconel® or Inconel/Stainless Steel
Absolute Pressures:
0 - 10 to 0 - 1000 Torr, 0 - 10 to 0 - 1000 mbar/hPa
0 - 2 to 0 - 20 psia, 0 - 2 to 0 - 100 kPa

Applications
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Semiconductor Process
Tools and Equipment
Laboratory and R&D
Test and Measurement
Metrology
Analytical Chemistry
Systems

Benefits
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etra's Vactron Model 760 capacitance
manometer is an absolute pressure
transducer designed for accurate and
repeatable vacuum measurements. Various
full scale ranges are available from 10 Torr up
to 1000 Torr. The units of measurement may
be specified in Torr, mBar/hPa, kPa or psia.

The Model 760 operates from a ±15 VDC
power supply and provides a 0-10 VDC or 0-5
VDC signal output that is linear with pressure
and independent of gas composition. The
electrical connection can be either the
industry standard 15 pin D-sub or 6 position
terminal strip connector.
Superior EMI/RFI performance is achieved by
the use of a metal case, in conjunction with
surge and ESD suppression components and
RFI filtering on the inputs and outputs. The
Model 760 has an integrated sliding cover that
provides easy access to multi-turn
potentiometers for fine zero and span
adjustments. Inconel® is used for all wetted
materials allowing the Model 760 to be used
with corrosive gases. A wide range of pressure
and vacuum fittings are available.

The high accuracy pressure sensing element
used in the Model 760 is the VactronTM sensor,
which has been developed from Setra’s
patented variable capacitance sensor. A
centrally located feed-through assembly
supports a circular electrode in close proximity
to the back surface of the diaphragm.
Together the electrode and diaphragm form
a variable capacitor within a small reference
vacuum chamber maintained at very low
pressure. As the pressure increases, the
diaphragm deflects and the gap between
the electrode and diaphragm decreases,
causing an increase in the capacitance. This
change in capacitance is detected and
converted to a highly accurate linear DC
electronic signal by Setra’s unique custom
integrated circuit, which utilizes a patented
charge balance principle.
Excellent zero stability and barometric
insensitivity are achieved through an innovative
sensor design. The Model 760 sensor contains
no fragile or complex parts found in similar
ceramic based capacitance manometers.

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Excellent Thermal
Stability
Superior EMI/RFI
Performance
Low Cost
Small/Compact Size
Inconel® Wetted Parts for
Corrosion Resistance
Various Fittings and
Electrical Connections
Meets CE Conformance
Standards

When it comes to a product to
rely on - choose the Model 760.
When it comes to a company to
trust - choose Setra - an ESOP
(Employee Owned) Company.

ISO
9001

Certified

Visit Setra Online:
http://www.setra.com

NOTE: Setra quality standards are based on ANSI-Z540-1.
The calibration of this product is NIST traceable.
Inconel is a registered trademark of Special Metal Corporation.
Huntington, WV, USA.

U.S. Patent nos. 4093915

159 Swanson Road, Boxborough, MA 01719/Telephone: 978-263-1400/Fax: 978-264-0292

800-257-3872