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Precision diamond scriber for manual wafer scribing0 pages
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| UNIEMP Universal Temperature Processes | |
| ModelRV-129 | |
| Precision diamond scriber for manual scribes for cerami glass or silicon substrates | |
| Precise manual diamond scriber, based on: | scribing tool touch down/lift up by vacuum piston Օ scribing pressure range: 5-581 grams by positioning weights on a balance scale indiviudal weights can be easily made by the customer Օ adjustable mounting position for the scribing toorto vary the scribing angle Micro meter screw adjustment for scribing height and X posi- |
| Օ rotating vacuum chuck for max. one tion of the scribing tool to single 200mm wafer match with the Y Une in the cross hair microscope 4 notches for the 90° snap into positions, mounted on a X/Y stage Օ Monocular cross hair micro scope, 25x, with illumination, with linear bearing, find adjustment 220VAC, 50Hz forthe angle position via microխmeter screw Dimension: 500x500x300mm | |
| Օ min. resolution: 0,006 degree, max. range: about 4° X-axis movement range/maximum substrate width: >/= 240mm Օ resolution 10 micro meter with digital gauge Y axis movement range/maximum scribing length: >/= 250mm Օ maximum substrat thickness: >/= 10mm adjustable touch down/lift up positions for the scribing tool to determine the required scribing length | Օ Weight: 25 kg Vacuum pump for wafer clamp and scribing tool not included (available as option) |
| UniTemp GmbH SenefelderStraf3e9 Phone +49 (0) 8441-78 76 63 info@unitemp.de D-85276 Pfaffenhofen Fax +49 (0)8441-78 76 64 www.unitemp.de | |
