PLASMA 5500 pages

PLASMA PLANT
Plasma cleaning and surface activation
TYP 550
Vacuum Plasma process
By means of plasma processes you reduce the costs of surface cleaning and degreasing,
you respect the environment, and these processes offer reliability in production over
conventional processes.
VTD utilzes this plasma technology for the following processes of plasma treatment and
surface techniques :
· Plasma glowing treatment prior to coating of surfaces in vacuum
· Protective coating of surfaces in vacuum with the monomer
HMDS (hexamethyldisiloxane) by means of plasma polymerization
· Plasma activation of surfaces prior to further treatment
· Plasma-aided coatings
Process run
The plasma is generated by making an air or gas mixture discharged in the vacuum chamber
by an excitation by means of a plasma generator. The air or gas are put into an ionized state
and the radicals responsible for the treatment and a UV radiation are released. The heat
loading on to the substrates is very low. With the plasma excitation being disconnected the
process is completed.