Swing Cathode0 pages
Swing Cathode™
FEATURES:
•• Designed to coat static substrates using a
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programmable magnet pack with swing
motion
Customizable drive shaft length
Compact and flexible form factor
Easy access water seal cartridge
Patented power-delivery technology
Simple design - fewer parts
Patented target water fill/drain feature
Continuously
rotating target
The programmable
magnet pack swings
inside the tube
BENEFITS:
•• Ideal for display or 3D part coating
•• High-packing density; dual cathodes in a
400mm space
•• All utilities are external and remain attached
during target changeover
•• High-power with no inductive heating impact
•• No brush dust
•• Simple, in-house maintenance
•• Coater is kept dry during target changes
Patent Pending Swing Cathode™
NEW SYSTEM INSTALLATIONS:
Normalized Thickness
•• Coater modification and integration
support available
•• Our compact design allows chamber design
flexibility and the ability to install more
cathodes in your system
•• Integrate with TRM-Bar,™ QRM-Bar™ or
mQRM-BarTM magnetics
Simulated Six Cathode Array with TRM™
100%
75%
50%
25%
0%
-800
-600
Cathode 1
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-400
Cathode 2
-200
0
200
Simulation Position, mm
Cathode 3
Cathode 4
Cathode 5
400
Cathode 6
600
Sum
< +/-1% uniformity with swing cathodes
vs. static target uniformity > +/- 15%
Closer TTS is possible with a swing profile
Model
Power
V/A
Target (mm)
SMS*
Up to 200kW DC or
80 kHz AC
1500V/450A
Up to 4000
*Also available with MM and CM external end blocks
800
"