MM-Series End Block0 pages
MM-Series End Block
FEATURES:
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Customizable drive shaft length
Very compact and flexible form factor
Easy access water seal cartridge
Patented power-delivery technology
Simple design - fewer parts and highly reliable
Magnet bar externally adjustable to any angle
Patented target water fill/drain feature
Patented MM-Series External
Mount End Block
Average weight: 32 kg
BENEFITS:
•• All utilities are external
•• Utilities remain attached during target changeover
•• Wider substrate coverage than traditional
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internal end blocks
Fits most chamber designs
High-power with no inductive heating impact - no
brush dust
High-packing density; dual cathodes in 350mm
space
Drive motors mount up, down, inward or outward
Simple, in-house maintenance
Allows co-sputtering, tighter plasma coupling,
and limits shield coating
NEW SYSTEM INSTALLATIONS:
UPGRADE PLANARS TO ROTARIES:
•• Coater modification and integration
support available
•• Switch between planars and sidemounts
in the same position
CANTILEVER CAPABILITY:
Metric: XY/2 + 16X2 < 92
Imperial: XY/2 + 0.9X2 < 8,000
X = Backing tube length (meters or inches)
Y = Weight of target (kg or lbs only)
•• Our compact design allows chamber design
flexibility and the ability to install more
cathodes in your system
•• Integrate with TRM-Bar,™ QRM-Bar™ or
mQRM-BarTM magnetics and e-Cathode™
systems - ready to install
Model
Power
V/A
Target (mm)
MM
Up to 100kW DC or
80 kHz MFAC
1500V/225A
Up to 2500
"