CM-Series End Block0 pages
CM-Series End Block
FEATURES:
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Customizable drive shaft length
Ultra compact and flexible form factor
Easy access water seal cartridge
Simple design, fewer parts, and highly reliable
Magnet bar externally adjustable to any angle
Patented target water fill/drain feature
Fits industrial standard 125mm ID target
sizes or smaller, 80mm size.
CM-Series External End Block
Average weight: 16 kg
BENEFITS:
•• All utilities are external
•• Utilities remain attached during target
changeover
•• Wider coverage than drop-in end blocks
•• Fits most chamber designs
•• Excellent power capability with no inductive
heating impact - no brush dust
•• High packing density; dual cathodes in
220mm space
•• Drive motors 3600 positioning
•• Simple, in-house maintenance
•• Allows co-sputtering, tight plasma coupling,
and limits shield coating
NEW SYSTEM INSTALLATIONS:
UPGRADE PLANARS TO ROTARIES:
•• Coater modification and integration
support available
•• Switch between planars and sidemounts
in the same position
CANTILEVER CAPABILITY:
Metric: XY/2 + 16X2 < 23
Imperial: XY/2 + 0.9X2 < 2,000
X = Backing tube length (meters or inches)
Y = Weight of target (kg or lbs only)
•• Our compact design allows chamber design
flexibility and the ability to install more
cathodes in your system
•• Integrate with TRM-Bar™, QRM-Bar™, or
mQRM-Bar™ magnetics and e-Cathode™
systems
Model
Power
V/A
Target (mm)
CM
Up to 20kW DC or
80 kHz MFAC
1500v/50A
Up to 1000mm
"