envis-ION? DMPTS0 pages
envis-ION™ DMPTS
FEATURES:
•• Flexible mounting options
•• 200+ hours per campaign
•• Hidden electrodes produce minimal
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contamination
Compact design
Wide operating pressure (3-40 mTorr)
Compatible with other PVD processes
Effective source to substrate range of
50-200mm
Long electrode life
Fast target change
Dual Magnetron Pretreatment Source
MOUNTING AND INSTALLATION OPTIONS:
BENEFITS:
Fits into your existing equipment
Fewer process disruptions; longer campaigns
Low cost of ownership
Promotes film adhesion
Reduced chance of substrate damage
Drives off water vapor and other volatile
contaminants from the substrate
•• Wide operating pressure
•• Highly tunable
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Plasma Pretreatment of Polyethylene
4
60
3
40
2
20
1
Surface Energy
Adhesion Per ASTM Test #3359
5
80
Surface Energy, Dynes
100
Flange:
•t All utilities exit the back of the source
through the flange
Cantilever:
•t All utilities exit the end
Remote:
•t The utilities are flexible and can exit the
back, the end, or travel from the source
through flexible bellows
Sputtered Aluminum Adhesion
0
0
0.25
0.5
1
2
4
8
16
32
64
128
Treatment Exposure (kW-min/m^2)
Model
Max Power
Typical
Power
Operating
Pressure
PET Surface Energy
at 6.7m/min
DMPTS
5kW/m
2-4 kW/m
2-40 mTorr
>65 Dynes
"