Short Bottom Mount Swing Cathode?0 pages
Swing Cathode™
nnnnSPUTTERING
nnnnCOMPONENTS
nnnnFEATURES:
nnnnO Designed to coat static substrates using
nnnna customer-programmable magnet pack
nnnnswing motion.
nnnnO Customizable drive shaft length
nnnnO Patented power-delivery technology
nnnnO Compact and flexible form factor
nnnnO Easy access seal cartridges
nnnnO Patented target water fill/drain feature
nnnnO Simple design - fewer parts
nnnnBENEFITS:
nnnnO All utilities are external and remain attached
nnnnduring target changeover.
nnnnO High-power with no inductive heating impact
nnnnO No brush dust
nnnnO High-packing density; dual cathodes in a
nnnn400mm space (205mm center-to-center)
nnnnO Simple, in-house maintenance
nnnnO Keeps your coater dry during target changes,
nnnnwhich reduces pump time and stabilizes your
nnnnprocess much faster
nnnnRETROFIT:
nnnnO Coater modification and integration support
nnnnavailable
nnnnO Compact and flexible design to fit almost every
nnnnchamber style
nnnnO Switch between planars and sidemounts in the
nnnnsame slot
nnnnShort Bottom Mount Swing Cathode7
nnnn(Patent Pending)
nnnnNEW SYSTEM INSTALLATIONS:
nnnnO SCI's compact design allows chamber
nnnndesign flexibility and the ability to
nnnninstall more cathodes in your system
nnnnO Integrate with TRM-Bar™ or QRM-Bar™
nnnnmagnetics and e-Cathode™ lid systems
nnnnModel | Power | Target (mm) | ||||
SMBS | Up to 200kW DC or 80 kHz AC | 1000v/450A | Up to 2000 |
Sputtering Components, Ine 375 Alexander Drive, Owatonna, Minnesota 55060 USA
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