Mini XP0 pages

Mini XP
TM

Advanced compact Fizeau interferometer with a proprietary method
of phase-shifting acquisition that enables reliable metrology in
production environments.

SYSTEM OVERVIEW
Description

Advanced version of the Mini
interferometer with additional software
functionality including phase map,
Zernikes, Seidels, ISO 10110-5,
comparative radius of curvature and
optional encoded radius of curvature.

Models

Base- includes mainframe, controller,
touchscreen, & acquisition trigger sensor.
Workstation- includes base components
plus vertical rail with part stage.
Encoded Workstation- includes workstation
components with encoded rail for radius of
curvature.

Measurement
Technique

Mechanical phase-shifting interferometry
with vibration tolerant acquisition.

Test Beam Diameter

60 mm

Zoom

1X to 4X, digital

Alignment FOV

±1.1 degrees

Laser Source

Laser diode, Class II

Wavelength

637 nm, nominal

Pupil Focus Range

±1500 mm

Coherence Length

>0.75 m

Transmission Spheres

RMS Simple
Repeatability (2σ)2
Acquisition Time

<3 sec (typical)

PHYSICAL CHARACTERISTICS
Mainframe
Dimensions (LWH)

5.6 kg (12.4 lb)

Workstation
Dimensions (LWH)

293 x 249 x 695 mm
(11.5 x 9.8 x 27.4 in.)

Workstation Weight

12.9 kg (28.5 lb)

Power

ZYGO Bayonet mount to M76x2.00-5g
thread; mounts into accessory receptacle.

226 x 140 x 183 mm
(8.9 x 5.5 x 7.2 in.)

Mainframe Weight

Attaches to part stage; useful when
measuring plano parts.

TS Adapter Ring

≤ λ/200 (3.2 nm)

60 mm clear aperture; Standard, surfaces
from 0.1 to 40% reflectivity; DynaflectTM,
surfaces from 4 to 90% reflectivity.

Tip/Tilt Mount

λ/12 PV

60 mm input aperture; λ/20 PVr quality;
f/0.7, f/1.0, f/1.5, f/2.0, f/3.4, f/5.7

Transmission Flats

PERFORMANCE
Optical Performance1

ACCESSORIES

100 to 240 VAC, 50/60 Hz

The rail provides
350 mm of travel
and features a
counterbalanced
part stage with
quick release
knobs for easy
z-axis positioning.

OPERATIONAL ENVIRONMENT3
Temperature

15° to 25°C (59° to 77°F)

Vibration Isolation

A vibration isolation table is not required
for typical test site environments
TRANSMISSION SPHERE COVERAGE
1. The instrument uncertainty budget supports surface form metrology of
λ/12 PV optical surfaces. The final metrology result is dependent on the
reference optic quality, environmental stability, and cavity geometry.
2. RMS Simple Repeatability is defined by 2X the standard deviation of the
RMS for 20 sequential measurements (no averaging) of a spherical cavity
between a 60 mm f/1.0 TS (reference radius = 47 mm) and a concave
test sphere of radius 25 mm.

3. These conditions define the environment under which the system can

operate; they do not represent the environmental stability required to
meet specified performance.

Specifications subject to change without notice

Zygo Corporation
Laurel Brook Road
Middlefield, CT 06455

Phone: 860-347-8506
Email: inquire@zygo.com
Website: www.zygo.com

SS-0097B 05/13
© 2013 Zygo Corporation