450mm Ceramic Heater Design and assembly0 pages
450mm Ceramic Heater
Design and assembly
Bottom view on the heater assembly with section
Cables routed to center,
can be connected to
feedthrough
Optional Isolation
Plate beneath heater
segments
(Zirconia, Cordierrite,
Zerodur, etc.
Silicon Carbide Top Plate
Ø450mm or Ø480mm (can
also be Aluminum Nitride)
Silicon Nitride
heater segments
(bolted to SiC plate)