EL-FLOW® Metal Sealed Gas Mass Flow Meters / Controllers0 pages
METAL SEALED
Digital Mass Flow / Pressure Meters and Controllers
> Introduction
Bronkhorst High-Tech B.V., European market leader in thermal
Mass Flow Meters/Controllers and Electronic Pressure Controllers,
has many years of experience in designing and manufacturing
precise and reliable measurement and control devices. With a wide
range of instruments, Bronkhorst High-Tech offers innovative
s
olutions for many different applications in many different markets.
The instruments are made to customers’ specification, in various
styles, suitable for use in laboratory, industrial environment,
h
azardous areas, semiconductor or analytical installations.
> Metal sealed
Since 1989 Bronkhorst High-Tech manufactures metal sealed
Mass Flow and Pressure Meters/Controllers, designed especially
to meet the requirements of the semicon market as well as other
high purity gas applications. The instruments feature high surface
q
uality and are of modular construction with metal-to-metal seals
that ensure long-term leak tightness. Metal sealed Mass Flow
Meters/Controllers can be supplied in ranges starting from
0.1…5 sccm up to 1…50 slm (based on N2) or even higher on
request. Metal sealed Pressure Meters/Controllers are available in
pressure ranges from 0.029…1.43 psi up to 18…900 psi.
> State of the art digital design
> General features
ut atented metal-to-metal seal construction ensures
p
long-term leak tightness (to atmosphere)
utelectropolished wetted parts
utfast response, excellent repeatability
utlow ranges from 0.1...5 sccm up to 1...50 slm
f
N2-equivalent (higher on request)
utMulti Gas / Multi Range functionality
utoptional solutions for low pressure drop or vacuum applications
utpressure ranges from 0.029...1.43 up to 18...900 psi
utoptional surface mount constructions
utcompliant with RoHS directives
Todays instruments are equipped with a digital pc-board, offering
high accuracy, excellent temperature stability and fast response
(settling time t98 down to 600 msec). The main digital pc-board
contains all of the general functions needed for measurement and
control. The latest EL-FLOW® design features Multi Gas / Multi
Range functionality, providing (OEM-) customers with optimal
flexibility and process efficiency. For the convenience of the
c
ustomer Bronkhorst provides easy-to-use configuration software
tools.
ut otary switches for selecting node address and the
r
In addition to the standard RS232 output the instruments also
offer analog I/O. Furthermore, an optionally integrated interface
board provides DeviceNet™, PROFIBUS DP, Modbus-RTU/ASCII,
EtherCAT® or FLOW-BUS protocols.
DeviceNetTM data rate
uthigh accuracy, ± 0.5% RD + ± 0.1% FS
utstorage of max. 8 calibration curves
utalarm and counter functions
utsingle rail power supply: +15 or +24 Vdc
> Digital features
utDeviceNetTM, PROFIBUS DP, Modbus-RTU/ASCII, EtherCAT®
or FLOW-BUS slave; RS232 interface