VANTAGE 2 ? 3D INTERFEROMETER0 pages

LOGO

P RODUCT

3D WHITE LIGHT INTERFEROMETER
0.1 NM RESOLUTION
SOPHISTICATED ANALYSIS AND
AUTOMATION SOFTWARE

Roughness of a mirror surface

Scratches on glas surface

Overview

Software

Applications

Bump measurement on a wafer

An outstanding feature is the ASCAN Software.
No programming skills are required to create even
complex programs in a few minutes:
t Automation of measurement routines
t Easy programming using tasks and templates
t Offset and fiducial correction using
t pattern recognition
t Built-in SPC Charts with reporting function
t Flexible, user defined data output format
t Barcode or user field input
t Step & Repeat function

The cyberSCAN VANTAGE 2 is an optical surface
metrology system. It combines a high resolution 3D
white light interferometer with x- and y-translation
stages. The interferometer technology offers
superior height resolution among optical surface
metrology methods. All electronic components of
the cyberSCAN VANTAGE 2 are integrated into a
robust housing, no cables or external controllers
are required. The system is connected with a single
USB cable to a workstation PC. The proprietary and
user friendly cyberTECHNOLOGIES Software offers
sophisticated surface metrology analyses and
automated measurement routines.

Typical applications are analyses on smooth and
flat surfaces, such as wafers, optical components,
mirrors or any other technical surfaces. With subnanometer resolution the cyberSCAN VANTAGE 2 is
a versatile measurement system with applications
in many industries. Roughness, texture and other
surface quality parameters are accurately and
repeatable measured on the following surfaces.
t Polished silicon wafers
tMEMS
t Optical components and lenses
t Medical devices
t Bearing surfaces

The proprietary cyberTECHNOLOGIES Software
Package SCAN SUITE combines system control, data
collection and data analysis in one user friendly
interface. Comprehensive profile, 3D and roughness
analyses conforming even to the latest DIN ISO
25187 are included. The software can stitch
multiple field of views to a large surface map with
up to 100 million data points and takes advantage
of the powerful Windows 7 64-bit platform.

Technology

t 3D white light interferometer
t Height measurement range 100 µm,
t 250 µm or 400 µm
t Height resolution 1 nm or 0.1 nm
t Lateral resolution down to 0.23 µm
t Lateral stitching capability for increased
t measurement areas
t x-, y- stage with reliable and precise controls
t 200 mm travel in x- and y-direction

SLOGAN

BECAUSE ACCURACY MATTERS