MI/MV0 pages
MI/MV Vaporizer Specifications
Model
MI-1000
Model
All liquids except those corrosive to stainless steel
(ex. HCl, HF)
Liquid Material
Liquid Material
Example generated flow rate: TEOS(to 7g/min),
IPA(to 3cc/min)
Heater
Heater
Wetted parts
120V(100W) / 208V(100W ) /240V(100W) available
SUS316L,PFA
Wetted parts
MV-1000
All liquids except those corrosive to stainless steel
(ex. HCl, HF)
Max. 5.0 CCM conversion (liquid phase
conversion)
Control Valve: 120V(100W) / 208V(100W) /
240V(100W) available
Vaporizer: 120V(100W) / 208V(100W) /
240V(100W) available
SUS316L,PFA
Setting Temperature
Max 140°C
Setting Temperature
Control Valve: Max 140°C Vaporizer: Max 200°C
Temperature Sensor
Thermocouple K type
Temperature Sensor
Thermocouple K type (Control valve, Vaporizer)
Temperature Switch
High limit 2450RC 160°C (ELMWOOD) NC type
Temperature Switch
Control Valve: High limit 2450RC
160°C(ELMWOOD) NC type
Vaporizer: High limit 2450RC 250°C(ELMWOOD)
NC type
External leak
-8
3
Less than 1 to 10 Pa·m /s (He)
Control Valve: Less than 1 to 10-6 Pa·m3/s (He)
External leak
Less than 1 to 10-8 Pa·m3/s (He)
Leak Integrity
Air Valve Option: Less than 1 to 10-9 Pa·m3/s (He)
Control Valve: Less than 1 to 10-6 Pa·m3/s (He)
Leak Integrity
Liquid Inlet 1/8inch VCR type Male
Standard Fitting
Vaporizer: Less than 1 to 10-9 Pa·m3/s (He)
Gas Inlet 1/4inch VCR type Female
Liquid Inlet 1/8inch VCR type Male
Gas Outlet 1/4inch VCR type Male
Operating Temperature
Pressure Resistance
Option
Weight (exclude cable)
Standard Fitting
15°C to 50°C
1.0MPa (G)
Pneumatic valve
620 ± 10g (Standard Type),
700 ± 10g (Air Valve Option Type)
Gas Inlet 1/4inch VCR type Female
Gas Outlet 1/2inch VCR type Male
Operating Temperature
Pressure Resistance
Option
Weight (exclude cable)
15°C to 50°C
1.0MPa (G)
Pneumatic valve
1110 ± 10g (Standard Type),
1190 ± 10g (Air Valve Option Type)
MI/MV Series Web Ver.001
Subject to chang