SHARPER0 pages
eurostars project 8304
HIGH ACCURACY
2D SLOPE MEASUREMENT
FOR HIGH QUALITY
MIRROR CHARACTERISATION
COMPLETE
METROLOGY PLATFORM
50 NRAD RMS
SLOPE ACCURACY
“Firstversion:fast,reliable,accurate,1.2mmspatialresolution,
able to measure sub 100 nrad rms (even below 50 nrad rms),
I look forward to the second generation.”
Dr. Mourad Idir
Optical Metrology, Energy Sciences Directorate/Photon Science Division
Brookhaven National Laboratory - NSLS II
SHARPeR is a Eurostars project that aims at developing a new high accuracy
automated metrology platform for extremely high quality optical components
needed for example in synchrotron beamlines, EUV lithography systems and
telescopes. Meter-scale X-ray mirrors will be characterized with a slope error
accuracy better than 50nrad rms.
The system includes three main elements:
A highly stable and repeatable motion platform with rotation and tip-tilt stage
A high precision wavefront sensor with an absolute accuracy of λ/1000 rms
An advanced stitching algorithm for high accuracy results
Contact Imagine Optic for more details : contact@imagine-optic.com