Open Center XY Monolithic Standard0 pages

Specifications

AI-CM-3000E-030-XY
30 x 30 mm

AI-CM-6000E-060-XY
60 x 60 mm

AI-CM-10000E-100-XY
100 x 100 mm

AI-CM-15000E-150-XY
150 x 150 mm

AI-CM-20000E-200-XY
200 x 200 mm

(Std.) │ ULTRA │ NANO
± 3.0 μm │ ± 0.5 μm │ ± 0.3 μm
± 2.0 μm │ ± 0.5 μm │ ± 0.3 μm
± 2.0 μm
± 30 nm
5 nm (Standard; Options avail.)
Non-Contact Linear Encoder
10 arc-sec
10 arc-sec
10 arc-sec
20 arc-sec │ 5 arc-sec │ 1 arc-sec

(Std.) │ ULTRA │ NANO
± 3.0 μm │ ± 0.7 μm │ ± 0.4 μm
± 3.0 μm │ ± 0.7 μm │ ± 0.4 μm
± 2.0 μm
± 30 nm
5 nm (Standard; Options avail.)
Non-Contact Linear Encoder
10 arc-sec
10 arc-sec
10 arc-sec
20 arc-sec │ 5 arc-sec │ 1 arc-sec

(Std.) │ ULTRA │ NANO
± 4.0 μm │ ± 1.0 μm │ ± 0.5 μm
± 3.0 μm │ ± 1.0 μm │ ± 0.5 μm
± 2.0 μm
± 30 nm
5 nm (Standard; Options avail.)
Non-Contact Linear Encoder
10 arc-sec
10 arc-sec
10 arc-sec
20 arc-sec │ 5 arc-sec │ 1 arc-sec

(Std.) │ ULTRA │ NANO
± 4.0 μm │ ± 1.0 μm │ ± 0.5 μm
± 4.0 μm │ ± 1.0 μm │ ± 0.5 μm
± 3.0 μm
± 30 nm
5 nm (Standard; Options avail.)
Non-Contact Linear Encoder
15 arc-sec
15 arc-sec
15 arc-sec
20 arc-sec │ 5 arc-sec │ 1 arc-sec

(Std.) │ ULTRA │ NANO
± 5.0 μm │ ± 1.0 μm │ ± 0.5 μm
± 4.0 μm │ ± 1.0 μm │ ± 0.5 μm
± 3.5 μm
± 30 nm
5 nm (Standard; Options avail.)
Non-Contact Linear Encoder
15 arc-sec
15 arc-sec
15 arc-sec
20 arc-sec │ 5 arc-sec │ 1 arc-sec

0.2 m/sec

0.3 m/sec

0.4 m/sec

0.4 m/sec

0.5 m/sec

0.3 G
8 kg
1.9 kg
1.5 kg
0.5 kg

0.3 G
10 kg
3.2 kg
2.5 kg
0.9 kg

0.3 G
12 kg
5.6 kg
4.4 kg
1.8 kg

0.2 G
12 kg
7.4 kg
5.7 kg
2.2 kg

0.2 G
15 kg
11.4 kg
8.7 kg
3.4 kg

Ironless, Brushless Servomotor
C12-1
30.48 mm

Ironless, Brushless Servomotor
C12-1
30.48 mm

Ironless, Brushless Servomotor
C12-1
30.48 mm

Ironless, Brushless Servomotor
C12-1
30.48 mm

Ironless, Brushless Servomotor
C12-2
30.48 mm

500 VDC
0.20 msec
130 °C
3.5 N/Apk

500 VDC
0.20 msec
130 °C
3.5 N/Apk

500 VDC
0.20 msec
130 °C
3.5 N/Apk

500 VDC
0.20 msec
130 °C
3.5 N/Apk

500 VDC
0.20 msec
130 °C
7.1 N/Apk

Phase Resistance (@ 25 °C) (5)

2.9 Ω

2.9 Ω

2.9 Ω

2.9 Ω

5.8 Ω

Phase Resistance (@ 130 °C) (5)
Inductance

4.2 Ω
0.6 mH
10 N
Up to 2.80 A
21 N
6.0 A
3.5 V/m/sec
001-08014-001
100,000 Hrs

4.2 Ω
0.6 mH
10 N
Up to 2.80 A
21 N
6.0 A
3.5 V/m/sec
001-08014-001
100,000 Hrs

4.2 Ω
0.6 mH
10 N
Up to 2.80 A
21 N
6.0 A
3.5 V/m/sec
001-08014-001
100,000 Hrs

4.2 Ω
0.6 mH
10 N
Up to 2.80 A
21 N
6.0 A
3.5 V/m/sec
001-08014-001
100,000 Hrs

8.3 Ω
1.2 mH
19.8 N
Up to 2.80 A
42 N
6.0 A
7.1 V/m/sec
001-08014-001
100,000 Hrs

Travel

Performance Spec's (1): Precision Grade
Linear Displacement Accuracy
Straightness
Flatness (2)
Bi-Directional Linear Repeatability
Resolution
Feedback
Pitch (all +/-)
Yaw (all +/-)
Roll (all +/-)
Orthogonality

Model:

Motion Profile Specifications
Max Velocity (3)
Max Acceleration (3)
Max Payload Capability
Assembly Mass
Moving Mass (X-Axis)
Moving Mass (Y-Axis)

Motion Profile Specifications

Motor Information
Drive Type
Motor Model
Magnetic Pitch (N-N)
Maximum line to line Voltage (4)
Electrical Time Constant
Maximum Motor Temp
Force Constant

Motor Information

Motor Connection: Delta
Continuous Force (6)
Motor Connection: Delta
Continuous Current (6)
Motor Connection: Delta
Peak Force (7)
Motor Connection: Delta
Peak Current (7)
Back EMF Constant
Corresponding ALIO Drawing #
Mean Time Between Failure
Notes:
(1) Specifications measured on stage centerline, 50mm above mounting surface. ALIO provides NIST traceable proof for all options/spec per quote.
(2) Flatness specifications dependent on system base. Contact ALIO for more information.
(3) Stage limitation at no load. Does not account for drive or resolution limitations.
(4) Back EMF plus IR drop must not exceed maximum line to line bus voltage.
(5) Resistance values do not include cable resistance. Cable resistance adds 0.146 ohm/m for Delta connection and 0.44 ohm/m for Wye Connection.
(6) Continuous operating limits are based on continuous operation at maximum temperature with aluminum heat sink (300mm x 12.5mm x motor length).
(7) Maximum on time at peak operating limits is 10 seconds.
(8) All electrical specifications may vary by 12% from listed values.
(9) Additional motor and travel options are available for each stage for optimized performance as necessary per customer requirements.
(10) Lack of mounting surface quality and environmental control may force stages out of these specifications.

Sitz: Weßling • Amtsgericht München HRB 200860 • Ust-IdNr.: DE285161566
Geschäftsführer: C. William Hennessey