LT 120 pages

This design is the third member of a new family of linear stages with very high acceleration, accuracy and repeatability. Driven by an ironless linear motor, position feedback by a non contact linear encoder and controlled by our Pegasus controller, this device is a new component for fast and high precise positioning. The LT12 is the ideal stage for clean room applications with its stainless steal cover and clean room lubrication. Two of these flat stages or one LT 12 and one LT 15 stage can be assembled as a cross version for two-dimensional positioning called KT12 or KT15/12. For narrow circumstances and for an optimal dynamic property the dimensions from the table are optimised and so the cable holder is made outside. Adjustable proximity switches are easily reached for travel range adjusting. This table is developed for mounting the ITK absolute measuring system microStar, in this case the limited switches can be removed. FEM optimisation at the design phase and the using of a steel construction provides a good stiffness to weight ratio. >

Features Applications

Linear motor driven Wafer positioning, even for clean room class 1 compatibility above the wafer Non contact position sensors No backlash High dynamic Measurement stages High accuracy Fast and precise micromanipulators High resolution Long lifetime All kinds of high precision positioning w Smooth moving at 1 m/s Faster then 1.000 mm/s >