MLA for UV Beam Shaping0 pages

LASERS & MATERIAL PROCESSING I OPTICAL SYSTEMS I INDUSTRIAL METROLOGY I TRAFFIC SOLUTIONS I DEFENSE & CIVIL SYSTEMS

UV Beam Shaping with CaF2 – Microlens Arrays

Laser beam homogeneity of UV lasers is a challenge. t
For a large range of applications a smooth beam profile
of an arbitrary input intensity distribution at a hight
power density is required.
In particular for UV-lasers such as Excimer lasers and
diode pumped frequency tripled lasers with their unique
ability to deliver high pulse energies, Microlens Arrays t
of CaF2 are suitable optics to produce homogenous
intensity distributions with a long durability which is
especially needed in industrial applications.
Jenoptik CaF2 – Microlens Arrays can reshape nearly
every input intensity distribution into well-defined, t
reproducible and custom top hat far-field profiles t
with a high efficiency over a long lifetime.

Features:
•t Excellent Deep UV Transmission
•t Higher damage threshold in the DUV compared t
to quartz
•t Custom design
•t High efficiency
•t Steep slopes of top hat profile
•t Low modulation
•t Insensitive to input beam shape
Applications:
•t Illumination systems for Semiconductor Industry
•t Ophthalmology
•t Laser materials processing
•t Printing technology
•t Measuring systems

Microoptics