Model 5910 UHP Moisture Analyzer0 pages

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PROCESS INSTRUMENTS

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Model 5910 UHP Moisture Analyzer

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Part-per-trillion Analysis for Your UHP Gases

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AMETEK Process Instruments'

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Model 5910 UHP Moisture

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Analyzer achieves never-before-

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seen baseline stability and

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sensitivity to sub-ppbv changes

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in moisture concentration while

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providing one of the fastest

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response speeds available. The

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improvements in stability and

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sensitivity are the direct result

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of a design that is very carefully

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engineered to provide you with

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the best protection obtainable for

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your semiconductor gas system.

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More Responsive Confirmation

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of Gas Quality Without False

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Alarms

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How well is your facility protected

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from moisture contamination?

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Why do you use moisture

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analyzers in your facility? You

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use them to protect your facility

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and its products from the costly

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results of contamination. To do

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this properly, it is necessary to

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know the actual ppbv moisture

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concentration in your facility

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piping—right now. Are you well-

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protected?

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How do your current moisture

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analyzers calculate their output?

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How timely is that information?

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Most technologies take hours or

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days to respond to changes in

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ppbv moisture concentration due

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to their equilibrium-dependent

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readings. You'll see defective

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wafers long before those

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analyzers see the actual moisture

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concentration. To try to work

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around that physical limitation,

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those analyzers often use

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predictive modeling to improve

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their apparent speed of response.

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Predictive models often ignore

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the initial detection of a change

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in moisture, and then, after

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collecting enough data, make

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a prediction. Such predicting

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often results in false alarms or,

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worse yet, a false low reading.

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Simply put, an analyzer that has

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to guess at the actual moisture

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concentration is a tremendous

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compromise in quality that you

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cannot afford to make.

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The Quartz Crystal Sensor

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The heart of the 5910

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analyzer is a quartz-crystal

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microbalance (QCM) sensor

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and sampling system

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developed by AMETEK

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specifically for highly accurate

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moisture measurements. The

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sensor consists of a pair of

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electrodes that support the

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QCM sensor. When voltage is

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applied to the sensor, a very

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stable oscillation occurs.

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The faces of the oscillator are covered with a hygro-

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scopic polymer. As the amount of moisture sorbed onto the

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polymer varies, the mass of the QCM changes, producing a

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corresponding change in the frequency of oscillation. This

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change is directly related to the moisture concentration of the

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surrounding gas.

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www.ametekpi.com

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