AX8407ds0 pages

W W W . M K S I N S T . C O M

Ozone Systems

SEMOZON® AX8407
HIGH CONCENTRATION, HIGH FLOW OZONE GENERATOR
Ozone is an environmentally friendly alternative to many chemical processes. It has a
high redox potential, can be generated at the point of use and is easily converted back to
oxygen. Typical semiconductor ozone applications include TEOS/Ozone CVD, Ta2O5 CVD,
photoresist strip, wafer cleaning, contaminant removal, surface conditioning, oxide growth,
and ALD. Ozone is also ideally suited for use in pharmaceutical and water processing
applications including cleaning, sterilization and disinfection, as well as Clean-In-Place
(CIP).
The SEMOZON AX8407 generator converts pure oxygen into ozone through silent electrical
discharge and achieves high output and high concentration level. It requires only minute
levels of dopant nitrogen gas, far below the levels required for competitive ozone generators.
As a result, the presence of contaminants, e.g. NOx compounds, is extremely low.

Features & Benefits
High Ozone Concentration and
Flow
•t Ozone concentration up to 335 g/Nm3 or tt
t 21.7 wt% at 5°C
•tO2 flow rate from 5 slm to 40 slm enables tt
t process flexibility
•t Patented cell structure design enables tt
t production of high concentration ozone
•t Closed-loop operation for tighter process tt
tcontrol
Clean, Saf Alternative to
e
Conventional Chemical Processing
•t
•t
•t
t

High redox potential
Can be generated at the point of use
Green chemical, easily converted back tt
to oxygen

Low Cost of Ownership
•t No consumables
•t No chemical disposal costs
Designed f Reliability and
or
Compliance
• Reliability tested to >100,000 hours
• CE, UL/CSA and F47 compliant