NANO POSITIONING SYSTEMS0 pages

nanoline™
nanoline™ Ceramic Servo motor driven positioning systems are useful for any application which demands precision and reproducibility at nanometer or even sub-nanometer levels. These applications include numerous types of microscopy and nano-alignment, micro and nano-manufacturing and optical positioning
Features and Benefits nanoline™ Positioning Stages
A great advantage of piezo motors is their intrinsic steady-state auto-locking capability. It does away with servo dither and the accompanying heat generation, an undesirable characteristic of electromagnetic linear motors. Ceramic servomotors are in principle nonmagnetic and vacuum-compatible, a requirement for many applications in the semiconductor industry. With a very compact size direct-drive ceramic motors allow design of ultra-compact translation stages.
Low Inertia allows high acceleration, speed and resolution. The nanoline™ stages achieve velocities to 200 mm/sec. They are also very stiff, a prerequisite in any fast step to-and-settle in position application. Settling time can be on the order of a few milliseconds with position resolution 10 nm. The absence of a leadscrew means no lubricant contamination and material relaxation causing observable sub-micron creep.
The nanoline™ series stage automatically create a powerful braking force when not energized without causing the position shift common with conventional mechanical brakes. This feature eliminates servo dither and steady-state heat dissipation providing rock solid in-position stability.
Vacuum compatible versions of nanoline™ positioning stages are available as standard options.
Applications
The Piezo drive is a low power drive engineered for precision actuation of light loads where the stage mass and user payload is typically below 20 kg. Applications include small and high precision systems in semiconductor, optics, metrology, micro-machining, MEMS laser, photonic biomedical and other leading edge deployments with high precision positioning requirements.
Available in wide range of sizes with slides ranging from 50-150 mm wide, and stage travel ranges from 10mm up to 1000 mm, nanoline™ series linear stages are based on a high true trajectory crossed roller or patented hybrid bearing guide system. A non-contact linear encoder provides a position feedback signal enabling closed loop position control. Encoder system resolution ranges from 1 ìm to 10 nm depending on customer requirements.
C-MAX 100
nano XY
NUTEC COMPONENTS INCORPORATED 81 Jefryn Boulevard, Deer Park NY 11729 www.NUTEC1.com
• Ultra-high precision guiding system provides stable trajectory across long travel in all nanoline™ configurations.
• Ceramic servomotors are used in the nanoline™ series positioning stages. A range of motor sizes allows precision matching of driving forces to various payloads and motion profiles.
• High-resolution encoders systems are incorporated to allow precise position feedback and closed loop digital servo control.
• Low single digit nanometer positioning and stability capability.