HWL6AL120 pages

PRECISION
IN MOTION

HWL6AL12

Motorised semi-conductor wafer inspection shuttle stage for
Olympus wafer handling systems

The Prior Scientific motorised shuttle stage is designed to be used for wafer inspection, using the Olympus AL120 wafer handling
systems. The stage greatly reduces operator error and fatigue, whilst increasing the rate at which wafers are
inspected.
The HWL6AL12 automatically loads and unloads wafers. When operating, the shuttle system automatically moves to the correct
load position and activates the loader switch, notifying the loader that the wafer chuck is ready to receive the wafer. After transfer
to the shuttle, the shuttle is retracted, allowing inspection. The stage allows either manual inspection using a joystick, or a t
pre-programmed pattern for wholly automated inspection.
The HWL6AL12 has a large travel range, coupled with superb repeatability and resolution and, used in conjunction with Prior’s
ProScanTM III system, ensures accuracy, precision, minimal error and ultimately a far more effective wafer inspection process.

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Travel range of 250 x 210 mm

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Resolution of 0.04 µm

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Repeatability of ± 0.2 µm

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Automatically loads and unloads wafers

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Compatible with the ProScanTM III system and Olympus AL120 wafer handling systems.

HWL6AL12 Version 2

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prior.com