AF 32® eco Thin Glass0 pages

AF 32® Thin Glass
Product Information
AF 32® eco is an alkali-free flat glass produced by a SCHOTT
specific down-draw ­ echnology, enabling production in a
t
t
­ hickness ­ ange from 0.03 mm to 1.1 mm.
r
Its fire-polished surface results in a low roughness value.
The coefficient of thermal expansion of AF 32® eco matches
­
silicon, therefore it is the perfect choice as ­ ptical ­ ackaging
­
o
p
material in ­ emiconductor related ­ pplications. Due to its
s
a
high transformation temperature it can be used for high
temperature applications up to ­ pprox. 600 °C.
a
AF 32® eco is available in wafer format and is ­ anufactured
m
with eco-friendly refining agents.
Applications
Wafer Level Chip Size Packaging
•t oefficient of thermal expansion match to silicon
C
•t High transmittance
•t arge sheet format suitable for 12-inch wafers
L
MEMS
•t oefficient of thermal expansion match to silicon
C
•t ow roughness due to fire-polished surface
L

Wafer Level Chip Size Packaging

MEMS

Wafer Level Optics
•t oefficient of thermal expansion matches
C
•t Silicon
•t High transmittance
•t everal thicknesses available
S
•t Tight thickness control
•t asy to dice by diamond saw
E
Technical Data
round and square custom size wafer formats, e.g. 6”, 8” or 12”

Surface roughness

< 1 nm RMS

Thicknesses

0.03 mm up to 1.1 mm

Standard thicknesses

0,3 mm, 0,4 mm

Luminous transmittance τvD65 (d = 0.5 mm)

91.9 %

Coefficient of mean linear thermal expansion α (20 °C; 300 °C)
(static measurement)

3.2 ⋅ 10 –6 K–1

Transformation temperature Tg

717 °C

Dielectric constant εr at 1MHz

5.1

Refractive index nD

1.5099

Density ρ (annealed at 40 °C/h)

2.43 g/cm3

Advanced Optics
SCHOTT AG
Hattenbergstrasse 10
55122 Mainz
Germany
Phone +49 (0)6131/66-1812
Fax +49 (0)3641/2888-9047
info.optics@schott.com
www.schott.com/advanced_optics

Version May 2013

Dimensions