SC-Series End Blocks0 pages
SC-Series End Block
nnnnSPUTTERING
nnnnCOMPONENTS
nnnnFEATURES:
nnnnO Patented power-delivery technology
nnnnO Unique target attachment method
nnnnO Durable, long-life rotary seals
nnnnO Industry standard mounting to lid
nnnnO Non-proprietary target design
nnnnO Patented target water fill/drain feature
nnnnBENEFITS:
nnnnO Highest reliability
nnnnO Simplest to install or retrofit
nnnnO Fastest target change available
nnnnO 1 hour annual maintenance
nnnnO 3 hour total end block rebuild
nnnnO Lowest maintenance cost
nnnnO Use targets from any vendor
nnnnO No inductive heating impact
nnnnO No galvanic corrosion
nnnnNEW SYSTEM INSTALLATIONS:
nnnnO Available as individual end blocks, end
nnnnblocks plus the TRM-Bar™ or QRM-Bar™
nnnnmagnetics, or complete e-Cathode™ lid
nnnnsystems with drive and utilities ready to
nnnndrop-in.
nnnnPatented SC-Series End Block
nnnnRETROFIT:
nnnnO Coater modification and integration
nnnnsupport available
nnnnO No lid modifications required
nnnnO Use existing utilities
nnnnO No changes to power, gas, or anodes
nnnnO Keep your current magnet assemblies or
nnnnupgrade to our TRM-Bar™ or QRM-Bar™
nnnnmagnetics
nnnnO Adaptable to your current target design
nnnnO Use for any length system
nnnnUPGRADE PLANARS TO ROTAR I ES:
nnnnO Increase the output and quality of your
nnnnexisting coater without adding chambers
nnnnTarget (mm) | |||||
sc | Up to 200kW DC or 80 kHz MFAC | 1000v/450A | Up to 4000 |
Sputtering Components, Ine 375 Alexander Drive, Owatonna, Minnesota 55060 USA
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