Sensirion Liquid Flow SLQ-QT500 Datasheet Preliminary V120 pages

Preliminary Product Specifications

SLQ-QT500 Liquid Flow Meter
High Purity Flow Meter

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For hydrocarbons and water-based liquids
For high and low viscosity fluids
Maximum flows up to 120 ml/min
High Speed Flow Measurement
Totally Non-Invasive, Straight flow channel
Digital RS485 Interface
Introduction SLQ-QT500

The SLQ-QT Liquid Flow Meter series enables fast, non-invasive measurements of liquids in semiconductor
applications. The SLQ-QT500 extends the series’ capabilities to higher viscosities, and also enables the measurement
of water based liquids such as TARC, acids, bases and DI water. The sensor is available with two calibrations: H2O
and isopropanol (IPA). The fluidic part of the device comprises a single straight flow path without any moving elements.
Due to the short response time, the SLQ-QT500 allows monitoring highly dynamic processes such as fast dosing
operations. Benefits are highly increased process reliability and reduced consumption of precious media.

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Preliminary Key Specifications – subject to change

Table 1: Specifications of SLQ-QT500 (all data at 23°C, 1 barabs unless otherwise noted)
Parameter

Maximum Flow Rate
(water based)
Maximum Flow Rate
(hydro carbon based)
Repeatability (1σ)
Flow Detection Response Time
Digital Interface (via RS485 Sensor Cable)
Power Supply DC, VDD
Protection Class
Internal Capillary, Inner Diameter
Attached tubing - inner / outer diameter
Response Time On Power-Up
Optimal Heat Up Time (for constant flow meas.)
Mounting Orientation Sensitivity d
Operating Temperature
Pressure Drop (IPA @ 2000 µl/sec)
Maximum Operating Pressure
Burst Pressure
Ambient Storage Temperature (empty channel)

SLQ-QT500

Units

2000 a

µl/sec

2000 b

µl/sec

2.0
<50
RS485
4.5 – 5.5
IP43
4.5
4.35 / 6.35 (¼’’)
< 120
500 – 1500
< 20
+20 ... +25
<< 1
10 e
40 f
-10… +60

% of m.v. c
ms
V
mm
mm (inch)
ms
ms
µl/s
°C
mbar
bar
bar
°C

Maximum flow rate of 5000 µl/sec for water based liquids on demand available
Maximum flow rate of 8200 µl/sec for hydrocarbon based liquids on demand available
c Measured value
d Normal position: horizontal flow channel, connector horizontally. For IPA @ 23°C
e The PFA tubing starts to widen over time at higher pressures than 10 bar. This results in a continuous pressure drop that would
have to be compensated
f Burst pressure is not limited by the quartz capillary in the sensor, but by the PFA tubing
a
b

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Version 12 - May 2013

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