0220 pages

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Transfer valve/insert MONOVAT

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>*Vr Series 02/03

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For SEMI applications handling

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200, 300 and 450 mm wafers

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For load lock / process module isolation

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Virtually particle and vibration-free

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>5 million cycles between maintenance

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Very easy maintenance

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thanks to self-adjusting plate

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Body material

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aluminum or stainless steel

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Valve

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Series 022

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double acting

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pneumatic actuator

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with position indicator

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SEMI E21-94

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SEMI E21-94

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SEMI E21.1-1296

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Insert

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Series 032

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double acting

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pneumatic actuator SEMI E21-94

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with position indicator SEMI E21-94

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SEMI E21.1-1296

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DN ( mm	D1 X D) inch	Ordering type B opening: rear side > seat side with bonnet flange		numbers type A opening: rear side = seat side with bonnet flange
		aluminum	stainless steel	aluminum	stainless steel
32 X 222	1.26 X 8.74	02209-BA24	02209-BE24	02209-AA24	02209-AE24
46 X 236	1.81 X 9.29	02210-BA24	02210-BE24	02210-AA24	02210-AE24
50x336	1.97 X 13.23	02212-BA24	02212-BE24	02212-AA24	02212-AE24
56 X 496	2.20 X 19.53	02213-BA24	02213-BE24	02213-AA24	02213-AE24

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with solenoid for impulse actuation: 022 . . -. . 44 (specify control voltage)

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Other opening sizes: see «Options»

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DN ( mm	D1 X D) inch	Ordering numbers type C
		aluminum	stainless steel
32 X 222	1.26 X 8.74	03209-CA24	03209-CE24
46 X 236	1.81 X 9.29	03210-CA24	03210-CE24
50x336	1.97 X 13.23	03212-CA24	03212-CE24
56 X 496	2.20 X 19.53	03213-CA24	03213-CE24

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with solenoid for impulse actuation: 032 . . -. . 44 (specify control voltage)

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Other opening sizes and insert types: see «Options»

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126

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K12 VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30 www.vatvalve.com

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