SC20FAST Magnetic Field Cancelling System0 pages

SPICER CONSULTING

SYSTEM SC20FAST

SC20FAST Magnetic Field Cancelling System

Overview
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Cancels the high frequency (9kHz typ.)
magnetic field from robotic wafer
transports in 300mm wafer fabs.

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Enables electron beam tools to meet
full specification in the vicinity of
overhead wafer transport robots.

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12 x field reduction at 9kHz

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>20 x field reduction from 25 Hz- 6 kHz
with AC sensor

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>50 x field reduction from DC - 1 kHz
with added DC sensor

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Adapts to field changes within 10 µs

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Full 3 axis (X, Y, Z) system

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>26 mG (2.6 µT) pk-pk cancelling range

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Simple “set and forget” operation

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Cancels and monitors the field

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Network monitoring option available

The SC20FAST is a version of our established
SC20 field cancelling system that has been
optimised to cancel the high frequency fields,
typically at 9kHz, from robotic wafer transports
in 300mm wafer fabs. These fields limit the
performance of electron beam tools in the fab
and are a barrier to achieving the next
semiconductor device CD node.
The principle of operation of the SC20FAST is
similar to our other field cancelling systems, as
on our website www.spicerconsulting.com
The field cancelling cables are installed in the
EBeam Tool enclosure (Figs. 1 & 2) or on a
frame (Fig. 8) around un-enclosed tools.
The SC20FAST uses a special, 25Hz - 200kHz
bandwidth AC field sensor (Fig. 4). The control
unit has faster output amplifiers and retuned
filters in the feedback loop. An SC20/DCMR
sensor (Fig. 5) can be added if DC field
cancelling is also required.

SPICER CONSULTING, Eden Laboratory, Broadmead Road, Stewartby, Bedfordshire, England MK43 9ND
Tel: +44 1234 765773 Fax: +44 1234 765778 E-mail: enq@spicerconsulting.com Web: www.spicerconsulting.com
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29-Mar-2010