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ANT95-XY ULTRA0 pages
Two-Axis XY Direct-Drive
Nanopositioning Stages
NANO Technology
nano Motion Technology
ANT95-XY-ULTRA
Integrated low profile XY linear motor stage
ANT95-XY-ULTRA Series
25 mm x 25 mm or 50 mm x 50 mm travel
Nanometer-level performance in a large
travel format
2D system accuracy is 250 nm
In-position stability of <1 nm
High dynamic performance
Introduction
ULTRA Trajectory Management System
Aerotech’s ANT95-XY-ULTRA is a long travel (up to 50 mm x
50 mm) nanopositioner for XY applications. Each axis uses
crossed-roller bearings, as well as Aerotech’s unique directdrive for non-cogging, zero backlash motion. In addition,
each stage receives a two-dimensional correction to achieve
unmatched nanometer resolution, accuracy, and repeatability.
This unique drive and bearing combination, packaged in an
extremely low profile and small footprint, offers tangible
advantages in your motion application.
In order to achieve the highest possible system accuracy from
our multi-axis nanopositioning systems, Aerotech has
developed an advanced, interactive, dynamic trajectory
management system. To take advantage of this sophisticated
interactive calibration system, the mechanical system has to be
completely assembled and functionally tested prior to
calibration in our best-in-class metrology labs. Nano-level
system accuracy can only be achieved under stringent
environmental conditions, calibrating with the best test
equipment, and utilizing the formidable capability of
ULTIMUS. By implementing the ULTIMUS dynamic trajectory
management system with the ANT95-XY-ULTRA, we are able
to produce 2-dimensional accuracies of ±250 nm or better.
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ANT95-50-XY 2D accuracy plot showing planar accuracy error
including straightness, orthogonality, and stage yawing.
The plots below illustrate performance differences between a
standard ANT95-XY and the -ULTRA version. Straightness
errors, orthogonality errors, and accuracy errors caused by
stage yawing are virtually eliminated.
Accuracy Error (m)
Accuracy Error (m)
The ANT95-XY-ULTRA extends the performance capability of
Aerotech’s ANT95-XY stage series to levels found nowhere
else. The exceptional geometric and dynamic performance of
the ANT95-XY-ULTRA make it an ideal choice for nearly all
high-end motion applications in the lab or in production
environments.
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ANT95-50-XY-ULTRA – exceptional 2D system accuracy with
Aerotech’s ULTRA version.
www.aerotech.com
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