METROSTAGE0 pages

NUTEC COMPONENTS INCORPORATED 81 Jefryn Boulevard, Deer Park NY 11729 www.NUTEC1.com
METROSTAGE
PRODUCT SUMMARY
METROSTAGE Series are high precision stages designed as an integral X/Y compound table for precise positioning. METROSTAGE is available with either solid top or in an open frame configuration.
.. Precision X/Y stage, with low-profile 3 tier construction
.. Linear Servo, Roller Leadscrew, or Ball Screw Drive System
.. Integrated non-contacting position encoders
.. Resolution down to 1 nanometer
.. Integrally pre-loaded roller guide system
.. Available with integrated servo control
.. Open frame Z-axis stage with nanometer performance
METROSTAGE Features & Benefits
MS-SP
This stage structure is a three-piece construction, designed for minimum distortion and highest precision stage geometry. Stiffness and stability have been maximized to achieve the highest support and integrity. The backlash-free preloaded guide system achieves smooth, low-friction, precision motion for highly accurate positioning and trouble free long-term performance.
Travel Length (mm)
100 x 100
150 x 150
200 x200
300 x 300
And Custom
Drive System
Step motor
Servo motor
Linear Servo Motor
Applications
Ceramic Servo Motor
Maximum Acceleration
Payload Dependent
The METROSTAGE Series has a very wide range of application, because of adaptable and configurations and execution, offering many different motion platforms with different characteristics. Many applications are found in the metrology and fabrication fields, where a precise, compact X/Y motion platform is desirable. Other typical applications are found in semiconductor assembly, testing, and fabrication areas, video inspection, micro-machining, laser machining, high-speed fabrication, laser and inspection work. Many customers utilize the stage with manual turn knobs, because of the insufficient precision performance of conventional microscope stages.
Maximum Speed
Linear Motor Drive
500 mm/s
Roller lead screw Drive 40 mm/s
Maximum Continuous Force
To match application
Recommended Maximum Load
L1Parallel to base
15 kg
L2 Tension
Perpendicular to base
15 kg
METROSTAGE Configurations
L3 Compression
Perpendicular to base
15 kg
Travels from 100mm x 100mm to 300 mm x 300mm
Stage height as low as 60 mm
Open Frame or Solid Top
Non-Contact Linear Encoder System
Feedback
Clean Room Compatible
Sinusoidal Output
1V(P-P) 20 micrometers/cycle
Vacuum Compatible
Non-Magnetic
4096x interpolation
100 nm, 50nm, 25nm, 12.5nm, 10nm, 1 nm
TTL resolution
Repeatability
5x Resolution
Construction
Aluminum Alloy Body
Hard Coat Gray
Anodize