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CMP StarKleen? Filter Capsules0 pages
CMP Filtration Capsules
nnnnData Sheet A47b
nnnnCMP StarKleen™ Filter Capsules
nnnnDescription
nnnnCMP StarKleen filter capsules are
nnnndesigned for the filtration of oxide and
nnnnmetal (including copper) slurries on or
nnnnnear tools used in chemical mechanical
nnnnpolishing (CMP).
nnnn• Compact, completely disposable,
nnnnall polypropylene filter capsule with
nnnnFlaretek1 connections for easy change-
nnnnout. Vents and drains are available
nnnnwith either NPT or Flaretek fittings.
nnnn• The capsules contain either the
nnnnpleated Profile® Star filter or the
nnnnstandard depth Profile® II filter
nnnn(DFA2Y005). The relatively deep,
nnnnwide pleats of the Profile Star filters
nnnneasily handle fluids containing high
nnnnsuspended solids. This design results
nnnnin low differential pressures, which
nnnnminimizes shear and provides long
nnnnservice life.
nnnn• The unique construction of these
nnnndepth filters provides for built-in
nnnnprefiltration assuring long service life
nnnnwith no breakthrough of contami-
nnnnnants nor shedding of filter medium.
nnnn• Profile depth filters provide a sharp
nnnnboundary between transmission of
nnnnnative slurry particles and removal
nnnnof gels and aggregates.
nnnnSpecifications
nnnnMaterials
nnnn• Medium: Continuous polypropylene
nnnnfilament
nnnn• Core, cage: Polypropylene
nnnn• Shell: Polypropylene
nnnnRemoval Ratings
nnnn• 0.5 urn, 1 urn, 1.5 urn, 3 urn, and
nnnn5 urn (Profile filter media removal
nnnnratings can be 5 - 10 times finer than
nnnntraditional ratings for depth filters.)
nnnnOperating Conditions
nnnn• Maximum pressure:
nnnn75 psi @ 77°F / 5 bar @ 25°C
nnnn• Maximum Differential Pressure:
nnnn45 psid @ 77°F / 3 bar @ 25°C
nnnn• Maximum Temperature:
nnnn100°F @ 30 psi / 40°C @ 2 bar
nnnnConnections
nnnn• Inlet / Outlet: %" Flaretek
nnnn• Vent / Drain: V" Flaretek or V" NPT
nnnn'Flaretek is a trademark of Entegris, Inc.
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