High load stack type actuator series PAHL0 pages

Piezo High Load Actuators
Series PAHL
Concept:
The PAHL series of actuators consists of high
number of piezoelectrical plates. Based on their
large size, they are ideally suited for high loads.
They have high blocking forces and can move
large masses. Due to the integrated mechanical
pre-load, they can work under tensile forces and
image: high load actuators series PAHL

work well in dynamic applications. Their high
resonant frequency guarantee fast setting times.
These actuators are useful for applications with
precision mechanics, valve technologies and
other fields, where high resolutions and high
forces are critical.

Product highlights:
•

stack type actuator in multilayer technique

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integrated pre-load for dynamic use

•

high tensile forces up to 350 N

•

motion up to 200 µm
(larger motions available on request)

Specials:
•

The resolution PAHL series is in sub-nanometer

high stiffness up to 165 N/µm

•

blocking force 3500 N

range and is limited only the signal noise.
As an option, these actuators are available with
strain gage sensors for motion control.
The pre-loaded stack type actuator is designed
for dynamical use.

Applications:
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wafer alignment

•

micro positioning

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scanning

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mirrors tilting

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info@piezojena.com • www.piezosystem.com
Series_PAHL_ds_Rev06_2014_07_10.doc

injection valve control

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Tel: +49 (3641) 66880 • Fax: +49 (3641) 668866

vibration generation and cancellation

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nanometrology